To strengthen Taiwan’s manufacturing sector in process optimization and enhance production efficiency, the National Science and Technology Council (NSTC) has actively promoted the development of innovative technologies in smart manufacturing. With long-term support from the NSTC, Professor Ming-Tsang Lee's research team at the Department of Power Mechanical Engineering, National Tsing Hua University (NTHU), has successfully developed a laser based green manufacturing technology tailored for optoelectronic and semiconductor products. This novel laser deposition and patterning technology, operating under ambient temperature and pressure, significantly shortens processing time and complexity. It remarkably reduces material costs and energy consumption, while offering high flexibility in both process design and system integration. This technology is highly applicable to the fabrication of emerging, high-value electronic and photonic products, including 3D semiconductor components, flexible optoelectronic devices, and silicon photonics.
The research team comprises experts from NTHU, National Taiwan University, and the National Center for Instrumentation Research with interdisciplinary and synergistic collaborations spanning laser processing, artificial intelligence, plasma chemistry, and opto-mechatronic system integration. This innovative laser processing technology coupled laser energy and highly reactive ionic precursor fluids, enabling selective and efficient three-dimensional patterning of metallic, semiconductor, and transparent conductive oxide materials within a single-step process. By switching the chemical composition of the reactive precursor fluids, the system is capable of depositing multiple materials on the substrate, achieving the integration of heterogeneous functional materials within a single laser manufacturing system. The metallic and transparent conductive oxide micropatterns fabricated using the developed laser processes exhibit material properties comparable to, or even surpassing, that of similar existing technologies. Furthermore, the reactive solutions employed utilize environmentally benign solvents and reducing agents. Aligning with the evolving trends of green manufacturing and heterogeneous integration in optoelectronic semiconductor device fabrication, the team has developed and integrated multiphysics modeling, generative artificial intelligence, and real-time optical diagnostics to construct a Digital Twin smart manufacturing platform. This system is capable of real-time identification and interpretation of complex signals during the manufacturing process, allowing for adaptive control of critical parameters. By integrating the technology with intelligent automated optical inspection systems, it can also be applied to circuit and device repair. This innovation has been recognized with the prestigious Future Tech Award by NSTC. The ultimate goal is to achieve “zero defect” precision laser manufacturing, aligning with the vision of intelligent, green, and sustainable for future electronics, optics and semiconductor products.
Media Contact：
Ming-Lun Tsai
Assistant Research Fellow
Department of Engineering and Technologies
National Science and Technology Council
Tel: +886 (2)2737790
E-mail: mltsai@nstc.gov.tw
